Products image
industrial control graphic High Voltage Source Magnet products Water Cooling High Voltage Analyzer Magnet A500 Beam Scanning Dose and Faraday array

To learn more about PTC products in this application, hover and click your cursor over each area above.

 

Industrial Control Example: Ion Implanter

Pyramid has supplied products and services particularly into the semiconductor process market.  The combination of sophisticated and ever advancing technology, the need for high reliability, and operating environments that often have high levels of HF, RF and transient electrical noise, make great demands on equipment.  Pyramid products feature a field-proven digital fiber optic communications channel that is immune to electrical interference.  It also allows control electronics to be placed at high voltage, for example in the terminal of an ion implanter, just as easily as at ground potential.


The modular nature of the Pyramid equipment allows large and complex systems to be set up and operated in the minimum time, saving you time and money in the prototype stage.  As you progress to regular production, you need to know that the equipment you buy is reliable and compatible with regulations.  Pyramid products are CE marked for compliance with the Low-voltage and Machinery Directives, and manufactured using RoHS-compatible materials and processes.


High Voltage Source Magnet

The use of fiber-optic communication allows control devices to be placed at high voltages. Local DC power can be provided using inexpensive DC plug-packs. Here, all functions internal to an ion source are controlled with the HV terminal. The M10 and B10 provide multiple channels of fast analog and digital I/O.

Beam Scanning

PTC hardware is used in a number of facilities to provide fast, high-precision magnetic scanning. Magnetic fields measured through the H10, dose distributions measured through the F3200, and other feedback signal can be used to modify the scan waveform. Typically, an A500 real-time controller is used to implement the feedback loop, which can operate at rates in excess of 10 kHz.

Beamline Design

Each M10 unit contains enough I/O to control all functions of most devices. Ideally, a single M10 is assigned to each device so that the control hardware remains electrically isolated. This drastically improves system resistance to EMI from sparking and other sources.

Dose and Faraday array

A number of devices, including the F100, I-200 and IC-101 provide low-current measurement in the mA to pA range with high absolute accuracy and high bandwith. In this instance, they can applied to dose control. Many application require higher density devices and these are available in 4-channel (I-404, I400) and 32-channel (F3200E, I3200) versions.

A500

Many applications require feedback and system coordination at kHz update rates. The A500 real-time controllers communicate with up to 10 fiber optic loops at rate of 10 MHz. Each fiber loop can include up to 15 devices. Embedded firmware can implement complex system functions at speeds that are not possible using a PC host. One or more A500's can be linked to a PC host, or with each other over 100 Mb Ethernet.

Analyzer Magnet

The 16-bit DAC's within the M10 I/O controller provides high resolution and excellent accuracy and stability. An M10 is used here to control an analyzer magnet. An H10 Hall probe module is used to provide feedback on the field. Other sources or feedback could include dual or quad current sensor measurements provided by the I-404 and I-400.